- P-ISSN 1225-0163
- E-ISSN 2288-8985
- P-ISSN1225-0163
- E-ISSN2288-8985
- SCOPUS, ESCI, KCI
Article Detail
Home > Article Detail
Quantitative analysis of hydrogen in thin film by scattering-recoil co-measurenment technique
Analytical Science and Technology / Analytical Science and Technology, (P)1225-0163; (E)2288-8985
2006, v.19 no.5, pp.400-406
&
(2006). Quantitative analysis of hydrogen in thin film by scattering-recoil co-measurenment technique. , 19(5), 400-406.
Abstract
Hydrogen analysis by elastic recoil detection has been performed utilizing polyimide film as a reference sample of known hydrogen content assuming the soundness of ion beam current integration. However beam current integration at higher incidence angle is not reliable. Scattering yield per unit fluence by current integration which is normalized per unit path length decreases as the sample tilt angle is getting higher. Moreover because beam current integration at high tilt angle is incomplete, hydrogen evaluation is very risky by direct comparison of sequentially collected recoil spectra between reference and target sample. In this study, primary ion beam dose is determined by backscattering spectrum that is collected simultaneously with recoil spectrum instead of ion beam current integration in order to reduce uncertainty arising in the process of current integration and to enhance the reliability of quantitative analysis. Three test samples are selected
- keywords
- Hydrogen analysis, ERD, Thin film
Other articles from this issue
- Generation of calibration standard gases using capillary gas divider : uncer-tainty measurement and method validation
- Characterizaion of composite prepared with different mixing ratios of TiO2 to activated carbon and their photocatalytic activity
- Determination of fluoride in fluorite mine wastewater by ion chromatogaraphy with post-wash technique
- Study on preparation of a thin film type of ZnS(Ag) scintillaator sheet for alpha-ray detection
- Effect of oxidants and additives on the polishing performance in tungsten CMP slurry
- Quantitative analysis of hydrogen in thin film by scattering-recoil co-measurenment technique
- Modification of conventional X-ray diffractometer for the measurement of phase distribution in a narrow region
- Determining of polycyclic aromatic hydrocarbons in domestic vegatables and fruits
- Effect of promoter on platinu, catalyst for oxidation of VOCs
- Rapid and simultaneous ddetermination of metabolites of organic solvents in human urine by high-performance liquid chromatography using a monolithic column
- Determination of 11-nor-9-carboxy-△9-tetrahydrocannabinol(THCCOOH) in human urine by solid-phase extraction and GC/MS
- more
Recommanded Articles
This website recommended the use the Chrome browser for journal website.