- P-ISSN 1225-0163
- E-ISSN 2288-8985
A laser induced breakdown spectroscopy (LIBS) measurement was carried out to derive an optimized measurement condition with a high reproducibility and to grow a plasma sphere to 20 ㎜ high under a 600 mtorr vacuum in order to improve an accuracy of measurement. The measurement of the plasma was taken at a 6.0 ㎜ distance, in the direction of a plasma sphere, from a sample. This location belongs to the outer sphere region in the plasma. The calibration curve of ‘Ni’ and ‘Cu’ was acquired by the signal intensity ratio and the atomic ratio for the samples, and linear regression of “Cu” was R²=0.9886, and the linear regression of “Ni” was R²=0.9988. The accuracy of LIBS was improved pre-existence as the measurement error of “Ni” was 0.78%.