- P-ISSN 1225-0163
- E-ISSN 2288-8985
The BaTiO3 powders and thin films were prepared by an alkoxide modified sol-gel process (polymerization-complex route) using ethylene glycol. The stable starting (Ba-Ti)-mixed metal organic sol was made by addition of acetylacetone. The BaTiO3 powders, which had a particle size of 40∼77 nm, were crystallized from an amorphous to a tetragonal phase on annealing at 700 and 1100 for 1 h. From FT-IR, solid-state 13C CP/MAS NMR spectroscopy and X-ray diffractometry, the trace of the Ba-Ti-oxycarbonate phase first appeared at 400 .Hydrolyzed sol was spin coated on a quartz wafer at 3500 rpm for 60 s and pyrolyzed at 1100 for 1 h. After heat treatment, the coated layer became dense and smooth.